Messprinzip

Ein innovatives, speziell gefertigtes Pendelsystem wird zwischen zwei Elektroden aus temperaturunempfindlichen Materialien in einem dichten und elektrisch abgeschirmten Raum aufgehängt. Die Auslenkung der Membran wird mit Hilfe einer hochpräzisen Auswerteelektronik gemessen und ausgewertet. Hierbei können Auslenkungen im einstelligen Nanometer-Bereich gemessen werden. Das Rauschen, welches durch das Messprinzip und die physikalischen Eigenschaften des Messsystems entsteht, wird durch den nach der Messelektronik nachgeschalteten digitalen Filter gefiltert.

 

Die nicht linearen Eigenschaften und Temperatureinflüsse werden durch ein spezielles Kalibrierverfahren auf einer hochpräzisen Kalibrieranlage linearisiert und kompensiert.

Das zur Verfügung stehende digitale Messsignal wird über ein Bus-System an die angeschlossenen Systeme übermittelt.

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